Switch-on filter for the channel that can be used to "debounce" the signals. This function also makes it possible for the module to lengthen a switch-off signal that would otherwise be too short. • Permissible values: 0 to 500,000 μs (corresponds to 0 to 0.5 s)Parameter only available for odd-numbered channels. This parameter specifies for function "dual-channel evaluation" the maximum time in which the selected "Dual-channel processing mode" is permitted to be violated by one of the input channels without an error being output. • Permissible values: 0 to 10,000,000 μs (corresponds to 0 to 10 s)Parameter only available for odd-numbered channels. This parameter specifies the type of dual-channel evaluation. Permissible values: • Equivalent • Antivalent
Configuring a switch-off filter lengthens the safety response time! The configured filter value must be added to the total response time. Danger! Signals with a low phase shorter than the safety response time can potentially be lost. Such signals should be lengthened accordingly using the "switch-on filter" function on the input module. Danger! Configuring a switch-off filter causes signals with a low phase shorter than the switch-off filter to be filtered out. If this results in a problem concerning safety functionality, then the switch-off filter must be set to 0. Lengthening the low phase with a switch-on filter is not possible in these cases.
that will limit the pressure from external gas sources to the level that the vacuum system can safely withstand. In addition, install suitable pressure relief valves or rupture disks that will release pressure at a level considerably below that pressure which the system can safely withstand. Suppliers of pressure relief valves and pressure relief disks can be located via an on-line search, and are listed on ThomasNet.com. Confirm that these safety devices are properly installed before installing the product. Ensure the following precautions are complied with at all times: (1) the proper gas cylinders are installed (2) the gas cylinder valve positions are correct on manual systems (3) the automation is correct on automated gas delivery systems Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is pressurized.
It is the responsibility of the Customer to comply with all local, state, and federal ordinances, regulations, and laws applicable to the installation, operation and service of this equipment. It is the responsibility of the end user to provide sufficient lighting at work to meet local regulations. Operation and Service of this equipment in strict accordance with the methods and procedures supplied by MKS is the responsibility of the Customer. MKS Instruments, Inc. assumes no liability, whatsoever, for any personal injuries or damages resulting from the operation or service of this equipment in any manner inconsistent or contrary to the methods supplied in MKS literature including, but not limited to, manuals, instructions, bulletins, communications, and recommendations. For emergencies and for product safety related matters, contact the MKS Customer Service Department. See Section 1.8 or Section 4.1 for detailed information regarding how to contact Customer Service Representatives.