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MKS 979B-01-0013 Vacuum Sensor
MKS 979B-01-0013 Vacuum Sensor
Product Details Introduction
MKS 979B-01-0013 is a high-precision vacuum pressure sensor belonging to MKS Instruments' Baratron ® Series, widely used in semiconductor manufacturing, vacuum system control, and precision gas measurement fields.
Main technical parameters
Measurement range: 0-100 pallets
Accuracy: 0.05%
Long term stability: 0.01%/year
Repeatability: 0.02%
Response time:<1 millisecond
Output signal: 0-5V
Supply voltage: 24V DC
application area
Semiconductor manufacturing: suitable for precision processes such as etching, deposition, ion implantation, etc
Thin film deposition: can be used for PVD, CVD, ALD processes
Vacuum coating: applied in industries such as optical coating and metal coating
Gas analysis: suitable for precision instruments such as chromatography, mass spectrometry, and infrared spectroscopy
Research experiments: Laboratory vacuum measurement in fields such as physics, chemistry, materials science, etc
This sensor adopts capacitive pressure measurement technology, which can provide extremely high stability and accuracy in high vacuum environments, making it an ideal choice for many high-end industrial and scientific research applications.
Product imag
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