MKS AX8407 Ozone Gas Generator

MKS AX8407 Ozone Gas Generator

Product Details Introduction

SEMOZON from MKS Instruments ®  AX8407 is a high concentration, high flow ozone generator that uses silent discharge technology to convert pure oxygen into ozone, with high output and high concentration levels. This device requires only a minimal amount of nitrogen doping and has extremely low nitrogen oxide (NOx) emissions, making it suitable for high demand applications such as semiconductor manufacturing.

Main technical specifications:

Ozone output: up to 335 g/Nm ³

Flow range: 5 to 40 slm

Raw material gas:

Oxygen: Grade 6 or higher purity O ₂

Nitrogen: 100 to 1000 ppm, grade 5 or higher purity N ₂

Chamber pressure: 15 to 45 PSI (100 to 310 kPa)

Cooling water temperature: 5 to 25 ° C

Control mode: front panel control and remote operation

Power requirements: 208 VAC (± 10%), three-phase, no neutral wire, 15A, 50/60 Hz

Size: 483 × 445 × 267 mm (width × depth × height)

Weight: 59 kg (130 pounds)

Application areas:

AX8407 is mainly used in semiconductor manufacturing, including:

Chemical Vapor Deposition (CVD)

Photoresist removal

Wafer Cleaning

Advanced packaging and display panel manufacturing

This device, with its high efficiency and low pollution characteristics, has become a reliable source of ozone gas in high-tech manufacturing processes.

Product imag

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