AMAT 130-0303 Remote Gas Panel

Product Details Introduction

Remote gas panels are typically used in semiconductor manufacturing and related industries to control and regulate gas supply. These panels can be used to manage and distribute different types of gases to meet specific process requirements in semiconductor production. The following are some common product features of gas panels that may be applicable to AMAT 130-0303 or similar products:

Gas supply management: Remote gas panels typically have the ability to manage multiple gas supplies, including controlling gas flow, pressure, and mixing ratio.

Multi channel control: The panel may have multiple gas channels for simultaneously controlling and distributing different types of gases.

Remote operation: The remote gas panel usually supports remote operation and can be controlled and monitored through external control systems or interfaces.

Safety and reliability: The panel may adopt various safety and reliability measures, such as air leakage detection, overvoltage protection, and emergency shutdown function, to ensure the safe and stable operation of the system.

Data recording and alarm: The panel may have data recording and alarm functions, which can record gas supply parameters and abnormal situations, and issue corresponding alarms.

Programmability and configuration flexibility: The panel may have programmability and configuration flexibility, which can be customized and adjusted according to specific needs.

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