Brooks 013501-161-27 Load Port Module

Brooks 013501-161-27 Load Port Module

Product Details Introduction

Brooks Automation's 013501-161-27 load port module is an interface module specifically designed for semiconductor manufacturing and precision automation equipment, mainly used for load port management in wafer handling systems. This module can effectively handle the loading and unloading process of wafers, providing support for safe and precise transfer of wafers from storage units to processing units.

main features 

High precision handling: This load port module supports precise wafer loading and alignment, ensuring that wafers are not damaged during transportation and maintaining high precision in the processing.

Reliable mechanical design: The module adopts a sturdy mechanical structure and materials, which can maintain stability under high-frequency operation and is suitable for long-term use.

Efficient transmission: The design optimizes the loading and unloading process of wafers, reducing the time of each handling cycle and improving overall production efficiency.

Easy to integrate: Supports integration with various wafer handling and processing equipment, compatible with Brooks or other brands' automation systems, suitable for multiple automated assembly lines.

Multiple security protections: equipped with sensors and control systems to ensure automatic shutdown in case of abnormal situations, avoiding damage to equipment and wafers.

application area 

Semiconductor manufacturing: used for secure transfer of wafers from storage units to processing equipment, widely used for load port management in front-end and back-end processes.

Automated assembly line: suitable for automated assembly and testing equipment that requires precise handling, especially in the field of electronic component assembly and testing.

Cleanroom environment: This module is designed to meet the requirements of a cleanroom environment and can operate under low pollution and low interference conditions, ensuring product quality.

technical specifications

Loading capacity: Supports standard wafer sizes and adapts to various specifications in the semiconductor industry.

Power requirements: Meet industrial grade power supply standards to ensure continuous and stable operation.

Interface compatibility: Supports standardized interfaces for easy connection with other automation control systems.

Operating environment: Suitable for clean room environments such as low temperature and low humidity, ensuring stable operation in harsh environments.

The Brooks 013501-161-27 load port module, with its high precision, reliability, and ease of integration, has become an indispensable component in the semiconductor manufacturing process, effectively improving the safety and efficiency of wafer handling and processing.

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