Brooks Automation 002-7391-07 Wafer Alignment Device

Brooks Automation 002-7391-07 Wafer Alignment Device

Product Details Introduction

Brooks Automation 002-7391-07 is a wafer aligner designed specifically for the semiconductor manufacturing industry, used for precise alignment of wafers in automated production lines. This type of equipment is typically used for important steps in wafer transfer systems, ensuring that the wafer is always in the correct position during processing to ensure high precision in subsequent processes.

Main features and specifications

Application areas:

Mainly used in semiconductor manufacturing, integrated circuit (IC) packaging, microelectronics, and other precision manufacturing fields.

Usually used in wafer transfer lines as an important component in wafer loading, unloading, and other processing steps.

Design and Construction:

High precision design: Wafer aligners typically require precise control at the micrometer level to ensure accurate alignment of each wafer and reduce errors.

Automated control: Most of these devices are equipped with highly automated control systems that can complete precise alignment tasks in automated production lines without human intervention.

Integrated vision system: Many wafer aligners are equipped with vision systems that can recognize the positioning, orientation, and other information of the wafer through high-resolution cameras, helping to achieve precise positioning and alignment.

Performance characteristics:

High precision alignment: Ensure that wafers can be accurately aligned during processing, testing, or transportation, avoiding production defects caused by inaccurate alignment.

High speed: Equipment usually has a fast operating speed and can complete the alignment task of multiple wafers in a short period of time, meeting the requirements of efficient production lines.

Automation and Intelligence: The equipment uses automatic control and intelligent algorithms to ensure that the alignment process does not require manual intervention and can automatically correct any deviations.

Strong adaptability: able to handle wafers of different sizes, thicknesses, and shapes, ensuring production line flexibility.

Environmental adaptability: It can work in clean rooms and other high-precision environments, meeting the strict standards of the semiconductor industry.

working principle:

Visual recognition and feedback: The aligner recognizes the position and direction of the wafer through a built-in camera or sensor, and adjusts it through a control system to ensure precise alignment of the wafer during transportation or loading/unloading.

Precise control: By using stepper motors or other precision drive systems, adjust the position and angle of the wafer to ensure that there will be no alignment errors in the subsequent processing technology.

Automatic calibration: During the wafer transfer process, if any slight deviation is found on the wafer, the system can automatically perform calibration to ensure high precision in continuous processing.

Control system and interface:

Automatic control system: Wafer aligners are usually equipped with PLC (Programmable Logic Controller) or other automatic control systems, which can be integrated with the factory's automated production line.

Compatible with production lines: Supports data sharing and linkage operations with other equipment on the production line, such as handling robots, wafer processing machines, etc.

Size and load capacity:

The wafer aligner of this model is designed to accommodate wafers of different sizes (such as 200mm, 300mm, etc.) and can handle various wafer boxes or carriers.

Product image

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