Brooks 017-0266-01 Wafer Processing Robot

Brooks 017-0266-01 Wafer Processing Robot

Product Details Introduction

Brooks 017-0266-01 Wafer Processing Robot is a robot system designed specifically for the semiconductor manufacturing industry, widely used for wafer processing, handling, and transportation. This type of robot can provide efficient material handling and operational support in precision and automated semiconductor production processes, especially in wafer access, transportation, and precise positioning, which have important applications.

Main features:

High precision handling and transportation:

The Brooks 017-0266-01 wafer processing robot has high-precision positioning and handling capabilities, which can ensure the integrity of wafers during handling and avoid damage caused by vibration, static electricity, or other external factors.

Automated control system:

The robot is equipped with an advanced automation control system, which can achieve fully automated operation. Through highly integrated control software, seamless integration and coordination with other devices on the production line can be achieved, ensuring efficient workflow and production pace.

High load capacity and stability:

Robot design can carry large loads and maintain stability during high-speed movement, adapting to various tasks in the semiconductor manufacturing environment, including wafer handling, washing, and transportation.

Support complex path planning:

Brooks 017-0266-01 robot supports complex path planning and dynamic path adjustment, enabling flexible response to changes in the production environment while ensuring high precision and efficiency.

Strong compatibility:

This robot is compatible with many semiconductor production equipment, such as wafer transfer systems (FOUP, SMIF), cleaning systems, inspection equipment, etc., and can work collaboratively in complex manufacturing environments.

Simplified operating interface:

The interface design is simple and easy to use, allowing equipment operators to quickly grasp the operation mode of the robot and also facilitate integration into automated production processes.

Durability and adaptability:

The robot adopts industrial grade design, with excellent durability and adaptability, and can work stably in highly clean environments (such as ISO 14644 Class 1 cleanrooms), meeting the high standard requirements of the semiconductor industry.

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