Brooks 001-0000-41 wafer index machine

Brooks 001-0000-41 wafer index machine

Product Details Introduction

The Brooks 001-0000-41 wafer index is a wafer positioning and handling equipment designed by Brooks Automation specifically for semiconductor manufacturing and processing. This index is used in automated wafer handling systems to transfer wafers to designated process steps through precise positioning and rotation functions. Its design takes into account the cleanliness and precision requirements of semiconductor production, and is one of the key components in efficient wafer processing.

Main features:

High precision positioning:

The Brooks 001-0000-41 wafer index provides high-precision rotation and positioning control, ensuring the accurate position of the wafer in each process step. This precise positioning helps improve production consistency and reduce positional deviations of wafers during handling.

The precise positioning function allows for fine-tuning of the wafer to meet the needs of different equipment and processes.

Fast response time:

This index can adjust the position with extremely short response time, suitable for high-speed and high-yield production environments. It can quickly move wafers between multiple process steps, improving the efficiency of the entire production line.

Durability and cleanliness:

Designed to meet the clean room standards of semiconductor manufacturing, the material has low particle generation characteristics and can operate for a long time in a clean room environment without contaminating the wafer surface.

Has good durability, can withstand continuous operation, and adapts to the harsh environmental requirements of semiconductor manufacturing.

Multi axis synchronous control:

The indexing device is equipped with a multi axis control system, which can control the rotation, tilt, and precise position adjustment of the wafer to meet diverse process requirements. Multi axis control is particularly suitable for use in wafer inspection, pattern alignment, and other processes.

Compatibility and modular design:

The Brooks 001-0000-41 indexer features a modular design that is compatible with other Brooks or third-party automation devices. Its design facilitates integration into wafer processing systems of different brands and models, enhancing the flexibility of the system.

The indexer supports multiple installation methods and can be flexibly configured in various devices, including cleaning, exposure, and etching equipment.

Real time feedback and monitoring:

Equipped with sensors and feedback systems, supporting real-time monitoring and position adjustment. This feature allows for self diagnosis of the device during operation, reducing downtime caused by malfunctions.

Support communication interface with the upper control system, allowing operators to obtain real-time device status and perform maintenance in a timely manner.

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