BROOKS 001-4130-03 Robot Aligner
Product Details Introduction
BROOKS 001-4130-03 Robot Aligner is a device designed specifically for semiconductor manufacturing and other high-precision industrial applications to ensure precise alignment of loading, unloading, or operational tasks performed by robots. This model is produced by Brooks Automation, and its high performance and reliability make it widely used in precision automation environments.
main features
High precision alignment
Provide sub micron level alignment accuracy to meet the standards of semiconductor and other high demand industries.
Support alignment of multiple types of wafers, carriers, or workpieces.
Modular design
Compact design, easy to integrate into existing automation equipment and systems.
Plug in structure, easy to replace and maintain.
Strong compatibility
Support multiple robot brands and models to ensure compatibility with a wide range of automation equipment.
Suitable for 200mm and 300mm wafer process flow.
Fast response time
High speed operation capability, able to quickly complete alignment tasks and optimize production pace.
Reduce production downtime and improve production efficiency.
durability
Using wear-resistant materials and high-quality components to meet long-term operational needs.
Can work in special environments such as clean rooms.
technical specifications
model: 001-4130-03
Alignment accuracy: ±1 µm
Compatible wafer size: 200mm and 300mm
Communication interface: RS-232 or Ethernet interface (please refer to the user manual for specific configuration)
Work environment:
Temperature range: 15 ° C to 30 ° C
Humidity range: 10% -60% (without condensation)
Power requirements: 24V DC
Size: Compact design, suitable for installation in narrow spaces
Weight: Lightweight structure, easy to integrate
Product image
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