LAM 810-073479-005 gas box motherboard

LAM 810-073479-005 gas box motherboard

Product Details Introduction

LAM 810-073479-005 is a gas box motherboard mainly used for gas control and distribution systems in semiconductor manufacturing equipment. The following are its main characteristics:

Accurate gas control: Provides precise gas flow control and distribution functions to ensure stable and reliable gas supply during the production process.

Multi channel support: supports control of multiple gas channels, can manage multiple gas sources simultaneously, and improve production efficiency.

High sensitivity monitoring: Integrated gas sensor interface, can monitor gas concentration and flow in real time, ensuring safe and stable operation.

Strong compatibility: Compatible with multiple gas types and devices, suitable for different manufacturing process requirements.

Remote monitoring and management: Supports remote monitoring and diagnosis through the network, facilitating device management and troubleshooting.

Protection function: It has safety functions such as gas leak detection and overpressure protection to prevent equipment and personnel from being injured.

Stability and durability: Designed to meet industrial standards, it can operate stably for a long time in harsh environments such as high temperature and humidity.

Integrated design: Integrating gas control and monitoring functions into one module, reducing equipment size and simplifying system design.

This gas box motherboard is widely used in semiconductor production lines, etching, cleaning and other processes to ensure precise control and safe use of gases, improve production efficiency and equipment safety.

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