LAM 810-01707-013 Gas Box Interlock Module

LAM 810-01707-013 Gas Box Interlock Module

Product Details Introduction

LAM 810-017075-013 is a gas box interlock module mainly used in gas management systems in semiconductor manufacturing equipment to ensure safe interlock operation of gas flow and gas equipment. The following are its main characteristics:

Gas interlock protection: This module ensures the safe interlock of the gas system with other equipment, preventing the start of gas equipment in unsafe situations and avoiding gas leaks and other potential hazards.

Real time monitoring: It can monitor key parameters such as gas flow rate and pressure in real time, and automatically trigger alarms or protection mechanisms in case of abnormal situations.

Multiple safety protection: Equipped with multiple protection functions, such as overvoltage, overcurrent, and gas leakage monitoring, to ensure the safe and stable operation of the equipment.

Integrated design: Integrating gas interlocking, monitoring, and alarm functions into one module, simplifying system architecture and reducing equipment complexity.

Remote diagnosis and control: Supports remote monitoring and control, facilitating real-time monitoring and fault diagnosis for operators, and improving equipment maintenance efficiency.

Strong compatibility: Compatible with different types of gas equipment and gas control systems, able to adapt to various application environments.

High reliability and durability: Adopting industrial grade design, it can work stably for a long time in harsh environments such as high temperature and high humidity.

Modular design: facilitates installation, maintenance, and replacement, reduces downtime, and ensures efficient operation of the production line.

This gas box interlock module is widely used in high-precision manufacturing fields such as semiconductors, optoelectronics, and chemical processing, for gas safety management and protection, ensuring the safety and stability of gas equipment during the production process.

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