LAM 810-328372-002 gas panel

LAM 810-328372-002 gas panel

Product Details Introduction

The LAM 810-328372-002 gas panel is a critical component in LAM Research equipment, typically used in gas control systems during semiconductor manufacturing processes. This gas panel can accurately control and distribute different gases to meet the strict requirements of the process, ensuring the stability of equipment operation and the accuracy of the process.

Product Features

Gas distribution and control:

This gas panel provides precise gas flow control and can regulate the supply of different types of gases to ensure the accuracy and stability of gas flow in the semiconductor manufacturing process.

It can support the input of multiple gases (such as nitrogen, oxygen, hydrogen, chlorine, etc.) and allocate them to different components or modules according to process requirements.

High precision sensors:

Equipped with high-precision gas flow sensors, real-time monitoring of gas flow rate, pressure, temperature and other parameters to ensure that gas supply meets process requirements.

Built in fault detection function ensures that the system can alarm in a timely manner when abnormalities occur, preventing process deviations.

Modular design:

Compact modular structure, easy to install and maintain, can seamlessly integrate with other equipment systems such as gas supply systems, gas filtration systems, etc.

Provide an easy to connect interface that supports rapid integration with existing devices.

Corrosion resistant materials:

Made of corrosion-resistant and high-temperature resistant materials to ensure stable operation in highly corrosive gases and high-temperature environments.

Security and protection functions:

Built in gas leak detection and automatic shut-off function ensure that gas supply can be quickly stopped and an alarm can be triggered in case of gas leakage or system abnormalities.

Technical specifications (assuming reference)

Parameter Description

Enter gas types such as nitrogen, hydrogen, oxygen, chlorine, etc

Adjustable range of output gas flow rate: 1-500 SCCM (standard cubic centimeters per minute)

Maximum working pressure 10 bar (depending on specific application)

Working temperature range -10 ° C to 60 ° C

Flow sensor accuracy ± 1% FS (full scale)

Gas leak detection with built-in gas leak monitoring function

Interface type: quick connection, standardized interface

Compact size, suitable for equipment slot and rack installation

Materials: corrosion-resistant materials such as stainless steel and fluoroplastics

Certification CE, UL and other certifications

Product imag

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