AMAT 0010-23716 Valve actuator

AMAT 0010-23716 Valve actuator

Product Details Introduction

AMAT (Applied Materials) 0010-23716 valve actuator, detailed technical and application information is as follows:

1、 Basic Information

Project Content

Manufacturer Applied Materials

Component model 0010-23716

Equipment type: Valve actuator

Gas flow control systems in typical semiconductor equipment, such as CVD, PVD, Etch and other processes

2、 Function and purpose

This actuator is usually used as the driving unit for vacuum valves or gas valves, responsible for precise control of the on/off status of gas or vacuum in various vacuum system equipment of AMAT.

Main functions:

Control the opening and closing of process gases (such as argon, fluoride, nitrogen, etc.)

Realize high-speed and precise gas switching

Used in conjunction with MFC (Mass Flow Controller) or pressure control system

Support operation in high vacuum or ultra-high vacuum environments

3、 Possible specifications (speculative information, based on common standards for AMAT actuators):

Project parameter description

Drive mode: Pneumatic or electric (some versions)

Response time<100ms (high-speed gas response requirement)

Material: Stainless steel/aluminum alloy shell, suitable for clean room environment

Integration of interfaces with AMAT cavity control systems (such as CENTURA, ENDURA)

Suitable for valve types such as Gate Valve, Pendulum Valve, Bypass Valve, etc

Vacuum compatibility high vacuum level (HV) or ultra-high vacuum level (UHV)

4、 Application Fields

This actuator is typically used in the following AMAT systems:

Etch system (such as CENTURA) ®、 Producer ®）

CVD/PVD system

ALD, RT-CVD or PECVD equipment

Vacuum pressure control circuit for chamber

Cleaning or gas replacement system for backend process section

Product imag

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