AMAT 1007-0016 Controller Module

AMAT 1007-0016 Controller Module

Product Details Introduction

AMAT 1007-0016 Controller Module Technical Description

1. Basic information

Model: 1007-0016

Manufacturer: Applied Materials

Equipment type: Semiconductor equipment dedicated controller

Applicable equipment: mainly used in 200mm/300mm wafer processing systems

2. Core functions

Core components of the equipment main control system

Responsible for equipment logic control and timing management

Coordinate communication with various subsystems (transmission/process/detection)

3. Typical applications

Wafer transfer system control

Process equipment timing management

Equipment safety interlock control

4. Technical features

Adopting real-time operating system (VxWorks)

Support SECS/GEM communication protocol

Built in device status monitoring function

Dual redundant power supply design

5. Maintenance points

Daily inspection:

Confirm that the status indicator light (LED) is functioning properly

Check the operation of the cooling fan

Record the operation log of the controller

Fault handling:

Prioritize saving system logs in the event of a malfunction

Check the contact status of the backplane connector

Verify the stability of the power supply (24VDC ± 5%)

Replacement steps:

Disconnect all connecting wires after shutdown

Record the original jumper settings

New module needs to load backup configuration file

Product imag

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