ABB DSDI 120AV1 3BSE018296R1 Front Plate

Developing high-precision position technology that meets the highest standards of various different technologies is the core business of PI (Physik Instrumente). Integrating different measuring technology often requires creating new interfaces to extend the possibilities for use. Therefore, a possibility was created to control PI positioners via the high-resolution signal of a Zygo interferometer. The difficulty was linking the different data protocols and achieving fast transmission in order to make real-time control possible. However, the advantages are obvious: The interferometer signal with a resolution of approx. 154.5 pm is comparable to the best path-measuring systems currently available for internal use. In addition, eliminating or not using an internal sensor reduces the heat transfer in the mechanics, which can contribute increased precision. If for example, the mirror element is attached directly next the part to be positioned, the influence of mechanical faults – such as deformation, thermal expansion or bearing play – is reduced.

Schematic representation of the experimental setup

An N-331.23 PICMAWalk walking drive was used as positioner, which was equipped with an internal sensor with approx. 10 nm resolution. A mirror was fixed to the end of the runner. A Zygo interferometer head (ZMI, model 7702) was positioned directly in front and its laser beam is aligned to the mirror. The measuring environment was a closed room with a foundation decoupled from the vibration and a temperature regulated to 20 °C (±0.1 °C), where all devices could be controlled from the outside. The positioners and the interferometer were mounted on an air-suspended bench. An E-712.1AN controller from PI was used with plug-in cards for controlling the positioner and tapping the sensor signals

To reduce heat transfer

 the control electronics for the interferometer (ZMI-4104C board and PI board for further communication via BiSS/SPI) and the PC were positioned outside of the measuring chamber. The ZMI-4104C board supplies the interferometer head and acts as optical interface to the head. It communicates with the PI electronics via the VME bus protocol, which can output the position signal via a BiSS or SPI interface, e.g., to a controller or a PC.

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