HONEYWELL 10004/H/F Radial vibration module

The E-712 controller from PI takes care of the actual control, controls the positioner, and taps the internal sensor signal. In addition, the controller gets the position signal from the interferometer via a BiSS or SPI interface. It is possible to decide in the E-712.1AN controller whether the internal sensor signal or the interferometer signal is to be used for the closed servo loop. Referencing is only done via the internal sensor. It would also be possible to use the interferometer signal as superordinate position feedback outside of the servo loop. However, this is not discussed in more detail below.If the interferometer signal is activated for control, it is possible to continue with commanding and positioning as usual.

Improved Position Control – Higher Resolution

 If you consider the difference in position control irrespective of which sensor is used, there are considerable differences. This is immediately apparent when moving the positioner stepwise close to the resolution limit of the sensors Noise The noise from the position signals of the internal sensor and the interferometer is shown in Fig. 3 without control and at rest. The specified values for "d_max" are the peak-peak values of the measured signals. In the case of the interferometer, it can be seen that the position noise 20 less that with the internal sensor, which basically allows higher accuracy.

The result of measuring with an internal 

sensor in a closed servo loop is shown in Fig. 1. The red signal shows the internal sensor signal. The step size set to 5 nm is just below the noise band. On the other hand, in the case of the interferometer signal, the steps are clearly recognizable. In addition, the inaccuracies in position control are also clearly visible and the results from operating at the resolution limit.Finally, the interferometer signal was used for the closed servo loop and the results are shown in Fig. 2. The step size is only 0.5 nm. It becomes quite clear that the internal sensor (red signal) cannot detect motion anymore, whereby the interferometer (blue) is still able to resolve very well. Unfortunately, the actual position stability can no longer be checked here because a it would be be necessary to use measuring equipment with a much higher resolution.

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