HONEYWELL 10101/2/1 Differential expansion module

Successful control of a positioner via a Zygo interferometer has some requirement: 

 PI controller that also acts as BiSS or SPI master (here, E-712.1AN controller with motor control card (E-711.C82) and additional BiSS respectively SPI-capable card (E-711.IS3) 

 An ACS controller could be used instead as long as it is capable of BiSS or SPI 

 PI positioner that is available with one of the above-mentioned controllers (here, N-331.23) 

 ZMI board (ZMI-4104C) for supplying and for optical communication with the interferometer head  PI board for communicating with the ZMI board via the VME bus and for outputting the position via SPI/BiSS 

 Zygo interferometer head (ZMI, model 7702) 

 Possibility of mounting the mirror element on the positioner  Preventing beam interruption between the Zygo and mirror

In some cases

 it is not possible to use this method:  In cases of low stiffness between the motor and the measuring point of the interferometer, the system is sensitive to resonances in the feedback loop. For example air bearing or magnetic drive positioners could be affected. The applicability of this technique must therefore be decided from case to case.  In addition, the drive system properties must be taken into account – e.g., whether this has sufficient minimum incremental motion

Conclusion 

In some applications, it can be helpful to control a positioner via an external interferometer rather than via the internal sensor. PI has succeeded in link different protocols and systems and use the interferometer signal directly for controlling in the closed servo loop. The advantage over internal sensors is the ability to attach the mirror for the interferometer directly to a place that is interesting for positioning. This reduces errors resulting from both mechanical and thermal influence. It is possible that the Zygo interferometer could also serve as calibrated measuring equipment. All components, except the interferometer head and the ZMI board, are offered by PI and therefore come from a single source. Of course, this method is not suitable for all positioners or applications. Our experts are at your disposal for any advice you may require.

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