ABB 1TGB302003R0003 Remote control card

The APA 302 is a unique in-line monitoring tool for advanced chip manufacturing in a cleanroom environment. This innovative equipment measures the airborne molecular contamination (in short AMC) in a FOUP and in the surrounding environment. Moisture and airborne molecular contamination such as elemental desorbing fluorine are released inside the FOUP space during queue times between the individual process steps. These elements can generate crystal growth on patterned wafers which leads to yield loss and performance degradation.

The FOUP can be delivered either manually 

or through overhead hoist transportation (OHT) to the two load ports. The APA 302 takes gas samples through the FOUP filters. The high sensitivity measurement with detection limits in the ppbv-range takes only 2 minutes. When there is no FOUP on the load ports, the APA 302 monitors the surrounding cleanroom environment. Thus, the queue times between the individual process steps can be optimized, increased contamination values immediately recognized and yields increased.

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